Fixed setting
flow switch with in-line flow
The
M-60 flow switches monitor increasing and decreasing
flow. They utilize a single moving part which
responds to fluid (liquid or gas) flowing within
a system. These switches are suitable for a wide
range of applications used in semiconductor, industrial,
biomedical, and OEM products. The flow switch
operates only when fluid flow is positively established.
The M-60 is available standard with 1/4”
FNPT connections.
Applications
• Sample flow monitoring
• Alarm actuation
• Purge flows
• Loss of flow protection
• Semiconductor etch tools
• Laser cooling equipment
Standard
Specifications
| Set Point Accuracy |
±10% maximum |
| Repeatability |
±2% |
| Hysteresis |
15% |
| Body Material
& Port Size |
| Aluminum |
1/4" FNPT |
| Brass |
1/4" FNPT |
| Acrylic |
1/4" FNPT |
| 316SS |
1/4" FNPT; SAE6 |
| PVC |
1/4" FNPT |
| Polypropylene |
1/4" FNPT |
| Flow Ranges |
| Air |
300 – 55000 NmLPM |
| Water |
10 – 1600 mLPM |
Product Data Sheet
Installation Manual
|
