Many CMP tools incorporate a peristaltic pump based fluid delivery system in conjunction with mechanical (moving part) flowmeters. These systems have an inherent performance / reliability weakness and often require quite frequent maintenance. Typical "problems" may include poor accuracy of slurry flow, pulsating slurry delivery, increased particulate being introduced into the flow stream, and preventative maintenance as frequently as every 2 weeks.

An ideal solution to the above is the use of Malema' s closed-loop flow control modules such as our FlowWiz MFC-8200 Series integrated flow control module. This product is designed to replace the peristaltic pump and mechanical flowmeter and is capable of precisely controlling slurry delivery to the polishing platen. Combining a high-accuracy ultrasonic flowmeter (no moving parts) with our quick-response "pinch tube" flow control valve, the MFC-8200 provides a new level of performance, reliability and cleanliness in CMP delivery applications. The MFC Series of controllers greatly improves tool reliability, slurry usage and wafer throughput.