The Wizardry of our Integrated Flow Controller

The Malema Integrated Flow Controller controls liquid and Slurry flows up to 4 Lpm to within 3% accuracy, while providing a quick response time of within 3 seconds for consistent control. Also, by utilizing its ultrasonic (non-invasive) based flow measurement and an optional Pressure transducer to monitor pressure, the Integrated Flow Controller offers direct flow measurement simultaneously, giving users two critical process parameters for monitoring and setting alarms.

Constructed of PTFE and PFA wetted parts; the Integrated Flow Controller was designed specifically for high purity, corrosive chemicals and CMP slurries. The splash proof exterior utilizes inert materials for harsh chemical environments. The patented ultrasonic flowmeter (with accuracies of 1% of reading) coupled with our Flow Control valve (with superb stepper control offering high accuracies with ultra-fast response times) allows for exceptional process control in a closed loop format.

With our advanced closed-loop technology, dispense rates are uniform, chemicals maintain their purity, and process yields improve. The Integrated Flow Controller provides automated control in one compact package while offering slurry and chemical dispense for CMP and Cleaning tool manufacturers automated control, precise blends, and enhanced yields. The most amazing benefit is that these flow controllers allow for obsoleting antiquated particle generating peristaltic pumps. Lower downtimes (with reduced PM's) and lower particle counts improve throughput to levels unheard of in the industry.

Go to Applications for information on your application, or to go beyond measuring and monitoring for reliable, accurate control contact us at 1-800-637-6418.

You'll be glad to have this Control Wizard working for you.