The MFC-7000 Integrated Flow Controller controls liquid and Slurry flows up to 4 Lpm to within 3% accuracy of the set point, while providing a quick response time of within 3 seconds for consistent control. Also, by utilizing its ultrasonic (non-invasive) based flow measurement, the Integrated Flow Controller offers direct flow measurement simultaneously, giving users a critical process parameter for monitoring and setting alarms. An optional pressure transducer can be integrated to monitor pressure.

•  Unbeatable Performance
•  Improved Yield
•  Significant Slurry/Chemical Savings
•  No Clogging
•  Clean Flow Path
•  Zero Particle Generation
•  Small Footprint

Constructed of PTFE and PFA wetted parts; the Integrated Flow Controller was designed specifically for high purity, corrosive chemicals and CMP slurries. The splash proof exterior utilizes inert materials for harsh chemical environments. The patented ultrasonic flowmeter (with accuracies of 1% of reading) coupled with our Flow Control valve (with superb stepper control offering high accuracies with ultra-fast response times) allows for exceptional process control in a closed loop format.

With our advanced closed-loop technology, dispense rates are uniform, chemicals maintain their purity, and process yields improve. The Integrated Flow Controller provides automated control in one compact package while offering slurry and chemical dispense for CMP and Cleaning tool manufacturers automated control, precise blends, and enhanced yields. The most amazing benefit is that these flow controllers allow for: obsoleting antiquated particle generating peristaltic pumps; manufacturing with less downtime (with reduced PM's); and a decrease in slurry consumption.