Closed Loop Integrated Flow Controller - Single Display Version
The MFC-8100 Series is a closed-loop flow controller designed for use
in a wide variety of high-purity liquids including
DI water, harsh chemicals and CMP polishing slurries.
It is capable of controlling flow rates
from 5 mL/min to 1250 mL/min at ±3%
accuracy of the 'set point' with a fast 3 second response
time. Each controller module contains four primary
components: Flow Meter, Flow Meter Electronics, Control Valve, and
Control Valve Electronics. In operation, the user inputs a flow
rate, 'set point', either manually or remotely via
an analog signal. The flow meter's
electronics continuously compares this set point
value with the actual measured fluid flow rate
and provides a continuous signal to modulate the
control valve to maintain the desired fluid flow rate. Custom-designed and user-selectable
PID firmware in the electronics insures the fastest
response time and accuracy. Single display for the flowmeter and control valve.
Applications
- Semiconductor
CMP tools – suitable
for use to precisely control the flow
of chemicals and polishing slurries dispensed
to the polishing platen; an ideal replacement
for peristaltic pump based delivery systems.
- Cleaning
tools – for
accurate and reliable control in the blending
and delivering of cleaning chemistries
on post CMP cleaning and related tools.
- Copper
plating tools – well suited
to chemical mixing and dispense applications.
Recommended Flowmeter Code
| Flow Range |
Recommended Flowmeter model |
Recommended Control Valve |
| 5-50 mL/min |
M-2000, M-2100 |
MFC-4600 |
| 10-100 mL/min |
M-2000, M-2100 |
MFC-4600 |
| 20-200 mL/min |
M-2000, M-2100 |
MFC-4600 |
| 50-500 mL/min |
M-2000, M-2100 |
MFC-4600 |
| 100-1000 mL/min |
M-2000, M-2100 |
MFC-4600 |
| 125-1250 mL/min |
M-2000, M-2100 |
MFC-4600 |
Product Data Sheet (Coming Soon)
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