
PFA Pressure
Relief Valves
Features
• High reliability
• Factory set
• Low pressure drop
• All mechanical
• Right-angle flow
• Flare type connection
• Bubble tight seal
Applications
• Special semiconductor equipment relief
valve applications.
Standard
Specifications
| Set Point Accuracy |
±2% maximum |
| Repeatability |
±1% |
| Body Material |
PFA |
| Port Sizes |
1/4” Flare,
Pillar Fitting |
| Flow range |
1/4” at cracking pressure from 20
to 90 psi |
| Maximum Operating Temperature |
104°C / 220°F |
Product Data Sheet
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