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The Gold Standard in Single-Use Flow Measurement
Malema’s SumoFlo® Single-Use Coriolis Flow Meters represent the gold standard in flow measurement. Malema SumoFlo® Single-Use Coriolis Flow meters have a disposable Flow Cell constructed of all Class VI Certified PEEK that can be replaced after each use or batch. Single-use flow meters are critical to reduce equipment turnaround times in biopharmaceutical manufacturing.
Flow Measurement and Control for Diamond Slurry in Semiconductor Processing
Accurate flow measurement and control of slurry dispense in semiconductor polishing and lapping tools is critical. It guarantees customers high throughput, reduced consumption, and consistent quality. Malema’s PFA Coriolis Mass Flow Meter and Flow Controller is the only flow measuring technology that is successfully used in high viscosity applications, such as diamond slurries.
Ultra-Low Flow Measurement in Single Use Applications

 

Engineering challenges are always exciting. It took us 2 years to perfect Malema's Low Flow Single Use Coriolis Flow Meter to perform to an accuracy specification of ±1% of reading across a flow range of 0.5 g/min to 50 g/min. Today the SumoFlo® CPFM-8103 Low Flow Coriolis Flow Meter is measuring consistently and accurately.

 Malema's Low-Flow SumoFlo Single-Use Flow Sensor

Why did our customer use Coriolis for his application? The major complaint from our customer was that all other technologies (including ultrasonic flow cells and clamp-on ultrasonic meters) have a significant drift and as such do not meet the high accuracy specs of ±1% of reading. Our customer also wanted a device that offered up accurate measurements when micro bubbles were present. All the devices he had tested just did not work with bubbles. He wanted accurate measurements from 1 g/min to 5 g/min.

If you do wish to receive a copy of the white paper on this application with all flow rate and calibration data collected, please email Malema Life Sciences at bio@malema.com

 

Preventing Cross Contamination with MIID

CMP Slurry and DI Water cross contamination events were disrupting operations and depressing yields at a major, multi-national semiconductor manufacturer. On a reoccurring but sporadic basis, the customer discovered CMP slurry contaminating its DI water systems or their CMP slurries supplies were inexplicably diluted. On some occasions, DI water was delivered to the platen when slurry had been requested. On other occasions, slurry was delivered when DI water was requested. Malema Sensors™ was approached for a very low flow, bi-directional flow switch that could detect and provide a warning that these events were occurring.

Malema™ Interconnect Interlock Device (MIID-1000)

Malema™ Interconnect Interlock Device (MIID-1000) U.S.Patent 8,997,789

Challenges


Malema™ investigated and determined that the underlying problem was an intermittent by-pass leak in a three-way diverting valve that developed during certain operating conditions of the polishing tool. The three-way valve was not damaged by these events, but wafers were lost and yield was reduced.


The problem was believed to be unexpected back-flows or internal by-pass leaks through the cross connection point in the CMP polishers. Upon inspection of the three-way valve at the cross connection point, no obvious defects were observed. Clearly, the by-pass leaks resulted from operational conditions beyond the capability of the three-way valve. Various sensors – including pH, conductivity, low-flow directional & bi-directional flow switches, and flow meters – were explored in an attempt to detect these back-flows and by-pass leaks as they were occurring. While it was found possible to detect these cross contaminating back-flows and by-pass leaks, the damage was already done by the time the events were reported.


A solution was needed that prevented these by-pass or reverse flow leakages from ever occurring.


The Malema™ Interconnect Interlock Device (MIID) solves these problems.

The MIID Solution 

Malema Sensors™ proposed a double containment system based on the Double Block & Bleed (DB&B) arrangement used in fuel gas distribution systems. For over one hundred years, fuel gas delivery systems have needed to provide absolute shut-off of gas flow past an isolation point so that workers could service downstream facilities in a safe manner. The solution developed was the Double Block & Bleed piping arrangement (Figure 1). This clever piping arrangement anticipates leaking valves, and yet provides absolutely positive shut-off. It can be relied upon in every situation. Malema started with this DB&B philosophy and added features required to manage CMP slurries. The result is the Malema™ Interconnect Interlock Device (MIID) (Figure 2).

Figure 1 - Classic DB&B

Figure 1 - Classic DB&B


By providing true double containment between the two liquid supplies, internal by-pass leaks and associated back flows are completely eliminated. In addition to eliminating undesired back flow events, the MIID also provides a warning signal when valves in the system begin developing by-pass leaks. From Malema™ lab testing we know that even when all the valves in a MIID are forced to leak there is still no opportunity for a by-pass leak to propagate material downstream to the POU or back upstream to the attached supply systems.

Figure 2 - MIID-1000 P&ID

Figure 2 - MIID-1000 P&ID


Prototypes of the MIID were built, installed and the cross contamination events stopped. On April 7, 2015, Malema Engineering Corporation was awarded U.S. Patent 8,997,789 for the Malema™ Interconnect Interlock Device (MIID) By-Pass Leak Detection and Prevention system.


Malema™ provides multiple-MIID retrofit kits including all the materials required to upgrade the leading polishing tools. Using these kits, skilled and experienced installation teams have completed polishing tool upgrades in as little as two hours. A preprogrammed, tiny PLC in a watertight enclosure (Figure 3) ensures a simple upgrade.

Figure 3 – MIID PLC and Enclosure

Figure 3 – MIID PLC and Enclosure

The MIID upgrade is completely transparent to the host tool controller. No adjustment to the host tool software is required. Existing plumbing and pneumatic signals are repurposed to manage MIID functions. Electrical connections between the MIIDs and the PLC are fully connectorized using plug & play Turck® PicoFast® connectors. If desired, the leak warning signal generated by the MIID PLC can be attached to existing user input channels on the host polishing tool.

Results

This customer buys new polishing tools and replaces the OEM supplied three-way valve with MIIDs prior to commencing operations. For over five years, MIIDs have been POR for several technology nodes.


Due to confidentiality concerns ROI is difficult to calculate, but the loss of wafers from this cause has been eliminated and in most operations only a few wafers saved more than covers the cost of a MIID upgrade.

 

© 2020 Malema Engineering Corporation. All rights reserved.

Malema Sensors is a registered trademark of Malema Engineering Corporation. Malema, the Malema logo, and Malema Engineering Corporation are trademarks of Malema Engineering Corporation.

Turck is a registered trademark of Turck Inc, and PicoFast is a registered trademark of Hans Turck GmbH and Co. KG. Turck Inc, and Hans Turck GmbH and Co. KG are not affiliated with Malema Engineering Corporation. All other trademarks are the property of their respective owners.

Malema supplies this publication for informational purposes only. While every effort has been made to ensure accuracy, this publication is not intended to make performance claims or process recommendations. Malema does not warrant, guarantee, or assume any legal liability for the accuracy, completeness, timeliness, reliability, or usefulness of any information, product, or process described herein. We reserve the right to modify or improve the designs or specifications of our products at any time without notice. For actual product information and recommendations, please contact your local Malema representative.

Improve Safety of Hydrogen Service using Malema™ M-VF Excess Flow Valves

Malema™ M-VF Series Adjustable Excess Flow Valves for Hydrogen Service

M-VF

Hydrogen is a hazardous fluid. Gaseous hydrogen is flammable over a wide concentration range, is easy to ignite, and is nearly invisible while burning. The gas is odorless and colorless, and can cause asphyxiation or unconsciousness if released into an enclosed space. Any rupture or leak in hydrogen transfer lines has to be arrested, avoiding catastrophic accidents. Installing Malema™ M-VF series Velocity Fuses in these transfer lines would prevent such accidents, saving valuable human lives and property.

Figure 1: Typical Flame Ionization Detector

Typical Flame Ionization Detector
  • A. Sample inlet
  • B. Oven
  • C. Hydrogen gas inlet
  • D. Oxidizer inlet
  • E. Positive bias voltage
  • F. Flame
  • G. Collector plates
  • H. Signal out
  • J. Exhaust port

Application: Hydrogen carrier lines in refineries and petrochemical plants

All refineries and various petrochemical and chemical plants use process gas analyzers such as gas chromatographs and TOC analyzers. Hydrogen is used as a carrier gas in gas chromatography and in various analytical instruments, most commonly as a fuel component of combustion gases for Flame Ionization (FID) and Flame Photometric (FPD) detectors. Spark discharge analyzers and total hydrocarbon measurements also use hydrogen mixtures. Using hydrogen as a carrier gas speeds up the process of analyzing the component.

Hydrogen is supplied via tubes from a bank of cylinders and a back up generator system to the analyzer cabin/room located inside the plant where analysis is done. Hydrogen used for this purpose is of very high purity (99.99999% pure).

The Malema™ M-VF series adjustable velocity fuse is a safety device used in tubes and pipe lines carrying hazardous and expensive fluids. A rupture or leak in the fluid path downstream of the safety valve increases the velocity of the fluid beyond a predetermined set level, causing the fuse to shut off flow through the line. 

Many gas analyzer and analyzer system manufacturers use Malema™ M-VF series valves in their systems. References can be produced on request.

© 2016 Malema Engineering Corporation. All rights reserved.

Malema, the Malema logo, Malema Sensors, and Malema Engineering Corporation are trademarks of Malema Engineering Corporation.

Malema supplies this publication for informational purposes only. While every effort has been made to ensure accuracy, this publication is not intended to make performance claims or process recommendations. Malema does not warrant, guarantee, or assume any legal liability for the accuracy, completeness, timeliness, reliability, or usefulness of any information, product, or process described herein. We reserve the right to modify or improve the designs or specifications of our products at any time without notice. For actual product information and recommendations, please contact your local Malema representative.