News & Insights

Accurate flow measurement and control of slurry dispense in semiconductor polishing and lapping tools is critical. It guarantees customers high throughput, reduced consumption, and consistent quality. Malema’s PFA Coriolis Mass Flow Meter and Flow Controller is the only flow measuring technology that is successfully used in high viscosity applications, such as diamond slurries.

Malema's SumoFlo® ULF CPFM-8103 flow meter achieves ±1% of reading across a flow range of 0.5 g/min to 50 g/min.

Engineering challenges are always exciting. It took us 2 years to perfect Malema's Low Flow Single Use Coriolis Flow Meter to perform to an accuracy specification of ±1% of reading across a flow range of 0.5 g/min to 50 g/min. Today the SumoFlo® CPFM-8103 Low Flow Coriolis Flow Meter is measuring consistently and accurately.

CMP Slurry and DI Water cross contamination events were disrupting operations and depressing yields at a major, multi-national semiconductor manufacturer. On a reoccurring but sporadic basis, the customer discovered CMP slurry contaminating its DI water systems or their CMP slurries supplies were in...

The Malema™ M-VF series adjustable velocity fuse is a safety device used in tubes and pipe lines carrying hazardous fluids such as hydrogen gas. A rupture or leak in the fluid path downstream of the safety valve increases the velocity of the fluid beyond a predetermined set level, causing the fuse to shut off flow through the line.