LFC-7000 Ultrasonic Liquid Flow Controllers

Industries: Semiconductor , Industrial
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The LFC-7000 Series high-performance closed-loop flow controllers are designed for use in a wide variety of liquids including DI water, harsh chemicals, and CMP polishing slurries.

The LFC-7000 Series is a line of high-performance closed-loop flow controllers designed for use in a wide variety of
high-purity liquids including DI water, harsh chemicals, and CMP polishing slurries.


• High Accuracy - Controls flowrate to within ± 1% of setpoint; ideal for fluid blending and/or dispense applications
• Fast Response 3 seconds (typically < 2 seconds for most applications)
• Broad application range with 2 types of control valves
• Wide range of flow control capability; 5 mL/min - 12000 mL/min (turndown can be as high as 100:1)
• All PTFE/PFA wetted part construction – insures compatibility with UHP liquid chemicals, DI water and CMP slurries (slurry module with Pt cured Silicone tubing)
• Low maintenance - modules featuring ultrasonic flowmeters with NO moving parts provide the ultimate in “uptime” (slurry module with pinch tube replacement cycle of 3 years or longer)


Performance Specifications

Standard Full Scale Range:

50, 100, 250, 500, 1000, 1500, 2500*, 4000, 8000, 12000 mL/min

(for room temperature DIW)

±1% of set point or ± 3mL/min
(whichever is larger)


±1% of set point or ±1 mL/min
(whichever is larger)

Control Repeatibility:

±0.5% of set point or ±0.5mL/min
(whichever is larger)

Flow Control Time:

< 3 sec

Fluid Temperature:

10 - 60 ºC***

Ambient: Temperature/Humidity:

0 - 40 ºC / 30 - 80% RH, without Dew

Maximum Expected Operating Pressure:

50 psig

Maximum Safe Internal Pressure:

70 psig

Differential Pressure Range:

7 to 30 psid

The enclosure footprint may be larger for these flow ranges to meet the pressure drop specification.
The minimum differential pressure requirements can be higher for these ranges.
**Please consult with Malema for tighter accuracy/repeatability needs.
*** Consult the factory for higher temperature application


Material Specifications

Non Wetted Parts, Enclosure:

PPS, PEEK, Acrylic,Vinyl, PVC**

Wetted parts:

PFA, PTFE, Pt cured Silicone*

*Only used in the Slurry Module
**Flame retardant (FMET4325)

Mounting Orientation:

Horizontal or Vertical

Fluid Connections:

Inlet/Outlet:1/4” or 3/8”, Flare or Pillar

Flow Restrictions (orifice):

> 2 mm

Ingress Rating:



Electrical Specifications

Power Supply Input:

24 Vdc ± 10%

Current Consumption:

Max 0.5 A

Alarm Signals:

Max 30 Vdc, 200 mA NPN open collector

ControlSignal In*:

0 to 10 Vdc or 4 to 20 mA

Flow Signal Out*:

0 to 10 Vdc or 4 to 20 mA**

* Other options available
** Both Active and Passive current options available


For additional specification details, please refer to the product data sheet located in the documentation tab of this web page. 

  • Semiconductor CMP tools - used to precisely control the flow of chemicals and polishing slurries dispensed to the
    polishing platen; an ideal replacement for peristaltic pump based delivery systems.
  • Wet Cleaning tools – for accurate and reliable control of the blending and delivery of cleaning chemistries.
  • Copper Plating tools – well suited to chemical mixing and dispensing applications.


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