Fluid material handling in the semiconductor industry requires processes that are accurate and repeatable, while maintaining the highest standards for purity and cleanliness. Reliability, quality, and productivity improvements improve throughput and give chipmakers an advantage in this highly competitive market. Malema’s high-purity solutions are engineered to improve process control through use of leading edge technologies.
Experienced in sensors, electronics, and process instrumentation, Malema incorporates groundbreaking state of the art technologies into every instrument.
The CMFC-5000 Integrated and Compact Coriolis Flow Controller controls liquid and Slurry flows up to 5000 grams per minute to within 1.5% accuracy of the set point, while providing a quick response time of within 2 seconds for consistent control. Mass flow measurement is fluid independent.
The LFC-7000 Series high-performance closed-loop flow controllers are designed for use in a wide variety of liquids including DI water, harsh chemicals, and CMP polishing slurries.
The LFC-7650 Series high-performance closed-loop flow controllers for CMP polishing slurries are designed as a drop-in upgrade to improve performance of existing semiconductor manufacturing polishing tools.
The CMFC-9000 Integrated Coriolis Flow Controller controls liquid and Slurry flows up to 3000 grams per minute to within 1.0% accuracy of the set point, while providing a quick response time of within 2 seconds for consistent control. Mass flow measurement is fluid independent.
The M-2111 Series flow detector has non-contact transducers and a PFA flow tube design without dead pockets. Its advanced signal converter with DSP electronics offers unmatched flow measurement capabilities even in tough applications. The M-2111 is an ideal choice for use in the semiconductor industry where extreme cleanliness and anti-corrosiveness are required.
The M-2700 series is an integrated flow meter in a small package. Transit-time ultrasonic technology with the latest digital signal processing (DSP) determines flow rate to ±1% of reading.
The CPFM-8800 Series is a family of advanced Coriolis flow meters fabricated exclusively from PFA polymeric material for measuring liquids in high-purity semiconductor, biopharm and other applications that require all-PFA wetted surfaces and provide a Mass Flow Rate, Total Mass and Temperature output with accuracy ±1% of reading.
Pressure Transducer for all Chemistries
The KL-92 is a pressure transducer suitable for use in monitoring pressure of various high-purity and corrosive/ aggressive fluids. The superior design provides for minimal “dead volume” which reduces the potential for contamination of the measured fluid / process. The KL-92 is available in two construction types: inline or insertion. The body construction meets IP-54 requirements.