Dispense pumps are expected to deliver very accurate and repeatable volume for dosing applications. However, often the volume dispensed changes without notice due to numerous factors that can include:
- Fluid contamination
- Trapped bubbles
- Fluid degradation
- Clogged filters (upstream or downstream)
- Pump malfunction
- Changes in pressure & temperature
The traditional gravimetric validation of dispense is accurate but slow, as it is typically manual and selectively sampled. It also results in loss of productivity as the process must be stopped to perform the validation.
Using a patented software algorithm and a proven non-invasive ultrasonic transducer, the MDM-3000 dispense meter provides instant verification of each dispense and warns the user of out-of-tolerance dispenses before they impact production yield. The MDM-3000’s sensor easily integrates into your existing dispense system in series with the dispense pump, and replaces flow meters, flow totalizers, controls, and alarms.
MDM-3000 is already in use in several industries. Semiconductor manufacturers use MDM-3000 in photolithography tools, to confirm the appropriate dose of photoresist has been delivered to microelectronic wafers. If improper doses are not caught in time, a defective wafer will go through additional production steps before the defect is discovered. Catching defects immediately improves overall fab yield and reduces tool downtime. Additional applications in semiconductor manufacturing include spin-on-glass and spin-on-dielectric.
MDM-3000 is also used to confirm critical dosing of saline solution for disposable contact lens packaging. In these and other applications, the MDM-3000 provides instant verification of each dispense and warns the user of out-of-tolerance dispenses caused by anomalies such as entrained bubbles, fluid contamination or faulty dispense hardware.
MDM-3000 can even measure liquids with high viscosities. The MDM-3000’s fluid path is a length of PFA tubing without any bends or unions, minimizing back pressure; the ultrasonic transducers are mounted outside of the PFA flow tube, and do not contact the process liquid. The remotely mounted electronics allow for easy installation in tool retrofits or for new tool construction.